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1

SPIE Proceedings [SPIE 1981 Brookhaven Conferences - Upton (Monday 16 November 1981)] High Resolution Soft X-Ray Optics - Imaging Performance Of A Normal Incidence X-Ray Telescope Measured At 0.18 keV

Henry, J. P., Spiller, Eberhard, Weisskopf, Martin, Spiller, Eberhard A.

Year:

1982

Language:

english

File:

PDF, 102 KB

english, 1982

2

Improved reflectance and stability of Mo-Si multilayers

Bajt, Saša, Alameda, Jennifer B., Barbee, Troy W., Clift, W. Miles, Folta, James A., Kaufmann, Ben, Spiller, Eberhard A.

Journal:

Optical Engineering

Year:

2002

Language:

english

File:

PDF, 328 KB

english, 2002

3

Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating

Spiller, Eberhard

Journal:

Optical Engineering

Year:

1986

Language:

english

File:

PDF, 2.42 MB

english, 1986

4

Low-Loss Reflection Coatings Using Absorbing Materials

Spiller, Eberhard

Journal:

Applied Physics Letters

Year:

1972

Language:

english

File:

PDF, 416 KB

english, 1972

5

Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager

Martínez-Galarce, Dennis, Soufli, Regina, Windt, David L., Bruner, Marilyn, Gullikson, Eric, Khatri, Shayna, Spiller, Eberhard, Robinson, Jeff C., Baker, Sherry, Prast, Evan

Journal:

Optical Engineering

Year:

2013

Language:

english

File:

PDF, 9.28 MB

english, 2013

6

Normal incidence soft x-ray telescopes

Spiller, Eberhard A.

Journal:

Optical Engineering

Year:

1991

Language:

english

File:

PDF, 382 KB

english, 1991

7

Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing

Spiller, Eberhard A.

Journal:

Optical Engineering

Year:

1990

File:

PDF, 858 KB

1990

8

SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Solar Physics and Space Weather Instrumentation - Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory

Soufli, Regina, Fineschi, Silvano, Viereck, Rodney A., Windt, David L., Robinson, Jeff C., Baker, Sherry L., Spiller, Eberhard, Dollar, Franklin J., Aquila, Andrew L., Gullikson, Eric M., Kjornrattana

Year:

2005

Language:

english

File:

PDF, 589 KB

english, 2005

9

SPIE Proceedings [SPIE Photomask 2001 - Monterey, CA (Wednesday 3 October 2001)] 21st Annual BACUS Symposium on Photomask Technology - Multilayer coating requirements for extreme ultraviolet lithography masks

Hector, Scott D., Gullikson, Eric M., Mirkarimi, Paul B., Spiller, Eberhard A., Kearney, Patrick A., Folta, James A., Dao, Giang T., Grenon, Brian J.

Year:

2002

Language:

english

File:

PDF, 332 KB

english, 2002

10

[Experimental Methods in the Physical Sciences] Vacuum Ultraviolet Spectroscopy I Volume 31 || 14. Reflecting Optics: Multilayers

Spiller, Eberhard

Year:

1998

Language:

english

File:

PDF, 988 KB

english, 1998

11

Recent developments towards high resolution X-ray imaging

Eberhard Spiller

Journal:

Nuclear Instruments and Methods

Year:

1980

Language:

english

File:

PDF, 511 KB

english, 1980

12

Fabrication of high-efficiency multilayer-coated gratings for the EUV regime using e-beam patterned substrates

Patrick P Naulleau, J.Alexander Liddle, Erik H Anderson, Eric M Gullikson, Paul Mirkarimi, Farhad Salmassi, Eberhard Spiller

Journal:

Optics Communications

Year:

2004

Language:

english

File:

PDF, 309 KB

english, 2004

13

Bemerkungen zu der Erscheinung der Granulation

Werner Martienssen, Eberhard Spiller

Journal:

Naturwissenschaften (The Science of Nature)

Year:

1965

Language:

german

File:

PDF, 1.16 MB

german, 1965

14

Experimental investigations on gain and maximum output of the He-Ne laser

Eberhard Spiller

Journal:

Zeitschrift für Physik A Hadrons and Nuclei

Year:

1965

Language:

english

File:

PDF, 620 KB

english, 1965

15

Coherence effects from visible light to X-rays

Eberhard Spiller

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Year:

1994

Language:

english

File:

PDF, 795 KB

english, 1994

16

Employing a detailed compositional analysis to develop a low defect Mo/Si deposition tool and process for EUVL mask blanks

Andy Ma, Rajul Randive, Patrick Kearney, San-In Han, Soon-Cheon Seo, Toshiyuki Uno, Dave Krick, Paul Mirkarimi, Eberhard Spiller

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 150 KB

english, 2006

17

The Optics of Long-Wavelength X Rays

Spiller, Eberhard, Feder, Ralph

Journal:

Scientific American

Year:

1978

Language:

english

File:

PDF, 877 KB

english, 1978

18

Controlled fabrication of multilayer soft‐x‐ray mirrors

Spiller, Eberhard, Segmuller, Armin, Rife, Jack, Haelbich, Rolf‐Peter

Journal:

Applied Physics Letters

Year:

1980

Language:

english

File:

PDF, 497 KB

english, 1980

19

Multilayer x‐ray mirrors: Interfacial roughness, scattering, and image quality

Spiller, Eberhard, Stearns, Daniel, Krumrey, Michael

Journal:

Journal of Applied Physics

Year:

1993

Language:

english

File:

PDF, 1.84 MB

english, 1993

20

Diffraction-limited large X-ray optics

Eberhard Spiller

Journal:

Journal of X-Ray Science and Technology

Year:

1994

Language:

english

File:

PDF, 749 KB

english, 1994

21

Interference Filters for the Ultraviolet and the Surface Plasmon of Aluminum

Spiller, Eberhard

Journal:

Year:

1974

Language:

english

File:

PDF, 1.15 MB

english, 1974

22

High Resolution Lenses for Optical Waveguides

Spiller, Eberhard, Harper, John S.

Journal:

Year:

1974

Language:

english

File:

PDF, 466 KB

english, 1974

23

Reflective multilayer coatings for the far uv region

Spiller, Eberhard

Journal:

Year:

1976

Language:

english

File:

PDF, 767 KB

english, 1976

24

Phase conventions in thin film optics and ellipsometry

Spiller, Eberhard

Journal:

Year:

1984

Language:

english

File:

PDF, 232 KB

english, 1984

25

Totally reflecting thin-film phase retarders

Spiller, Eberhard

Journal:

Year:

1984

Language:

english

File:

PDF, 758 KB

english, 1984

26

X-ray tests of multilayer coated optics

Golub, Leon, Spiller, Eberhard, Bartlett, R. J., Hockaday, M. P., Kania, D. R., Trela, W. J., Tatchyn, R.

Journal:

Year:

1984

Language:

english

File:

PDF, 667 KB

english, 1984

27

Large area coatings with uniform thickness fabricated in a small vacuum chamber

Hayden, Cindy J., Spiller, Eberhard

Journal:

Year:

1989

Language:

english

File:

PDF, 738 KB

english, 1989

28

Fabrication and testing of large area multilayer coated x-ray optics

Spiller, Eberhard, Golub, Leon

Journal:

Year:

1989

Language:

english

File:

PDF, 819 KB

english, 1989

29

Refractive index of amorphous carbon near its K-edge

Spiller, Eberhard

Journal:

Year:

1990

Language:

english

File:

PDF, 675 KB

english, 1990

30

Atomic-Precision Multilayer Coating of the First Set of Optics for an Extreme-Ultraviolet Lithography Prototype System

Montcalm, Claude, Grabner, R. Frederick, Hudyma, Russell M., Schmidt, Mark A., Spiller, Eberhard, Walton, Christopher C., Wedowski, Marco, Folta, James A.

Journal:

Year:

2002

Language:

english

File:

PDF, 160 KB

english, 2002

31

High-Performance Mo-Si Multilayer Coatings for Extreme-Ultraviolet Lithography by Ion-Beam Deposition

Spiller, Eberhard, Baker, Sherry L., Mirkarimi, Paul B., Sperry, Victor, Gullikson, Eric M., Stearns, Daniel G.

Journal:

Year:

2003

Language:

english

File:

PDF, 256 KB

english, 2003

32

Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography

Soufli, Regina, Hudyma, Russell M., Spiller, Eberhard, Gullikson, Eric M., Schmidt, Mark A., Robinson, Jeff C., Baker, Sherry L., Walton, Christopher C., Taylor, John S.

Journal:

Year:

2007

Language:

english

File:

PDF, 2.17 MB

english, 2007

33

Camera for coherent diffractive imaging and holography with a soft-x-ray free-electron laser

Bajt, Saša, Chapman, Henry N., Spiller, Eberhard A., Alameda, Jennifer B., Woods, Bruce W., Frank, Matthias, Bogan, Michael J., Barty, Anton, Boutet, Sebastien, Marchesini, Stefano

Journal:

Year:

2008

Language:

english

File:

PDF, 1.97 MB

english, 2008

34

Propagation of x rays in waveguides

Spiller, Eberhard, Segmuller, Armin

Journal:

Applied Physics Letters

Year:

1974

Language:

english

File:

PDF, 385 KB

english, 1974

35

SPIE Proceedings [SPIE SPIE Astronomical Telescopes + Instrumentation - Amsterdam, Netherlands (Sunday 1 July 2012)] Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray - In-band and out-of-band reflectance calibrations of the EUV multilayer mirrors of the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory

Soufli, Regina, Spiller, Eberhard, Windt, David L., Robinson, Jeff C., Gullikson, Eric M., Rodriguez-de Marcos, Luis, Fernandez-Perea, Monica, Baker, Sherry L., Aquila, Andrew L., Dollar, Franklin J.,

Year:

2012

Language:

english

File:

PDF, 1.56 MB

english, 2012

36

THE FABRICATION OF MULTILAYER X-RAY MIRRORS

Eberhard Spiller, Armin Segmuller, Rolf-Peter Haelbich

Journal:

Annals of the New York Academy of Sciences

Year:

1980

Language:

english

File:

PDF, 643 KB

english, 1980

37

SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] X-Ray and Extreme Ultraviolet Optics - Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite

Louis, Eric, Spiller, Eberhard A., Abdali, Salim, Christensen, Finn E., Voorma, Harm-Jan, Koster, Norbert B., Frederiksen, Peter K., Tarrio, Charles, Gullikson, Eric M., Bijkerk, Fred, Hoover, Richard

Year:

1995

Language:

english

File:

PDF, 357 KB

english, 1995

38

Smooth multilayer films suitable for x-ray mirrors

Haelbich, Rolf-Peter, SegmuÌller, Armin, Spiller, Eberhard

Journal:

Applied Physics Letters

Year:

1979

Language:

english

File:

PDF, 483 KB

english, 1979

39

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - High-performance multilayer coatings for EUV lithography

Spiller, Eberhard, Khounsary, Ali M., Dinger, Udo, Ota, Kazuya

Year:

2004

Language:

english

File:

PDF, 274 KB

english, 2004

40

SPIE Proceedings [SPIE 1981 Brookhaven Conferences - Upton (Monday 16 November 1981)] High Resolution Soft X-Ray Optics - Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy

Rudolph, D., Niemann, B., Schmahl, G., Spiller, Eberhard A.

Year:

1982

Language:

english

File:

PDF, 3.63 MB

english, 1982

41

Saturable Optical Resonator

Spiller, Eberhard

Journal:

Journal of Applied Physics

Year:

1972

Language:

english

File:

PDF, 897 KB

english, 1972

42

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Emerging Lithographic Technologies XI - Defect mitigation and reduction in EUVL mask blanks

Randive, Rajul, Ma, Andy, Reiss, Ira, Mirkarimi, Paul, Spiller, Eberhard, Beier, Bernd, Uno, Toshiyuki, Kearney, Patrick, Jeon, Chan-Uk, Lercel, Michael J.

Year:

2007

Language:

english

File:

PDF, 514 KB

english, 2007

43

Imaging performance of multilayer x-ray mirrors

Spiller, Eberhard, Wilczynski, Janusz, Stearns, Daniel, Golub, Leon, Nystrom, George

Journal:

Applied Physics Letters

Year:

1992

Language:

english

File:

PDF, 638 KB

english, 1992

44

Smoothing of multilayer x-ray mirrors by ion polishing

Spiller, Eberhard

Journal:

Applied Physics Letters

Year:

1989

Language:

english

File:

PDF, 485 KB

english, 1989

45

Summary Abstract: Multilayer thin films for x-ray optics

Spiller, Eberhard

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1988

Language:

english

File:

PDF, 326 KB

english, 1988

46

SPIE Proceedings [SPIE 29th Annual Technical Symposium - San Diego (Tuesday 20 August 1985)] Applications of Thin Film Multilayered Structures to Figured X-Ray Optics - Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating

Spiller, Eberhard, Rosenbluth, Alan E., Marshall, Gerald F.

Year:

1985

Language:

english

File:

PDF, 622 KB

english, 1985

47

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Advances in multilayer reflective coatings for extreme ultraviolet lithography

Folta, James A., Bajt, Sasa, Barbee, Jr., Troy W., Grabner, R. Fred, Mirkarimi, Paul B., Nguyen, Tai D., Schmidt, Mark A., Spiller, Eberhard A., Walton, Christopher C., Wedowski, Marco, Montcalm, Clau

Year:

1999

Language:

english

File:

PDF, 443 KB

english, 1999

48

SPIE Proceedings [SPIE 33rd Annual Techincal Symposium - San Diego (Monday 7 August 1989)] X-Ray/EUV Optics for Astronomy and Microscopy - Filters For Soft X-Ray Solar Telescopes

Spiller, Eberhard, Grebe, Kurt, Golub, Leon, Hoover, Richard B.

Year:

1989

Language:

english

File:

PDF, 3.67 MB

english, 1989

49

SPIE Proceedings [SPIE 1981 Brookhaven Conferences - Upton (Monday 16 November 1981)] High Resolution Soft X-Ray Optics - X-Ray And Extreme Ultraviolet Imaging Using Layered Synthetic Microstructures

Underwood, James H., Barbee, Troy W., Shealy, David L., Spiller, Eberhard A.

Year:

1982

Language:

english

File:

PDF, 2.42 MB

english, 1982

50

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Soft X-Ray and EUV Imaging Systems II - Improved reflectance and stability of Mo/Si multilayers

Bajt, Sasa, Alameda, Jennifer B., Barbee, Jr., Troy W., Clift, W. Miles, Folta, James A., Kaufmann, Benjamin B., Spiller, Eberhard A., Tichenor, Daniel A., Folta, James A.

Year:

2001

Language:

english

File:

PDF, 131 KB

english, 2001